{"id":4951,"date":"2022-06-18T16:28:01","date_gmt":"2022-06-18T08:28:01","guid":{"rendered":"https:\/\/www.innotronix.com.cn\/?page_id=4951"},"modified":"2022-10-02T13:56:42","modified_gmt":"2022-10-02T05:56:42","slug":"cmp-slurry","status":"publish","type":"page","link":"https:\/\/www.innotronix.com.cn\/?page_id=4951","title":{"rendered":"\u5316\u5b66\u673a\u68b0\u629b\u5149\u6db2|CMP Slurry"},"content":{"rendered":"\t\t<div data-elementor-type=\"wp-page\" data-elementor-id=\"4951\" class=\"elementor elementor-4951\" data-elementor-post-type=\"page\">\n\t\t\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-979d11b elementor-section-stretched elementor-section-full_width elementor-section-height-default elementor-section-height-default\" data-id=\"979d11b\" data-element_type=\"section\" data-settings=\"{&quot;stretch_section&quot;:&quot;section-stretched&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-no\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-cf0ebdb\" data-id=\"cf0ebdb\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-9bfe658 elementor-widget elementor-widget-image\" data-id=\"9bfe658\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img fetchpriority=\"high\" decoding=\"async\" width=\"1800\" height=\"460\" src=\"https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/cmp_1800x480-px.jpg\" class=\"attachment-full size-full wp-image-4955\" alt=\"\u5316\u5b66\u629b\u5149\u6db2\" srcset=\"https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/cmp_1800x480-px.jpg 1800w, https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/cmp_1800x480-px-300x77.jpg 300w, https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/cmp_1800x480-px-1024x262.jpg 1024w, https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/cmp_1800x480-px-768x196.jpg 768w, https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/cmp_1800x480-px-1536x393.jpg 1536w, https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/cmp_1800x480-px-600x153.jpg 600w\" sizes=\"(max-width: 1800px) 100vw, 1800px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-7562190 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"7562190\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-2ee07ee\" data-id=\"2ee07ee\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-728d0e5 elementor-widget elementor-widget-heading\" data-id=\"728d0e5\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h1 class=\"elementor-heading-title elementor-size-xl\">\u5316\u5b66\u673a\u68b0\u629b\u5149\u6db2|CMP Slurry<\/h1>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2b46dae elementor-widget elementor-widget-heading\" data-id=\"2b46dae\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h5 class=\"elementor-heading-title elementor-size-default\">\u66f4\u9ad8\u54c1\u8d28\u3001\u66f4\u9ad8\u6027\u4ef7\u6bd4\uff01<\/h5>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-b205f7d elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"b205f7d\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5e4bf98 elementor-widget elementor-widget-heading\" data-id=\"5e4bf98\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-medium\">\u4ea7\u54c1\u63cf\u8ff0<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-bb4bcaa elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"bb4bcaa\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-2b79719\" data-id=\"2b79719\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-5812d79 elementor-widget elementor-widget-image\" data-id=\"5812d79\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img decoding=\"async\" width=\"750\" height=\"349\" src=\"https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/wafer-polish-chs.jpg\" class=\"attachment-large size-large wp-image-4961\" alt=\"\" srcset=\"https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/wafer-polish-chs.jpg 750w, https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/wafer-polish-chs-300x140.jpg 300w, https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/wafer-polish-chs-600x279.jpg 600w\" sizes=\"(max-width: 750px) 100vw, 750px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-63783a2\" data-id=\"63783a2\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-b088311 elementor-widget elementor-widget-text-editor\" data-id=\"b088311\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u5316\u5b66\u673a\u68b0\u629b\u5149CMP(Chemical Mechanical Polishing)\uff0c\u4ea6\u4f5c\u5316\u5b66\u673a\u68b0\u5e73\u5766\u5316(Planarization)\uff0c\u662f\u96c6\u6210\u7535\u8def\u5236\u9020\u8fc7\u7a0b\u4e2d\u5b9e\u73b0\u6676\u5706\u5e73\u5766\u5316\u7684\u5173\u952e\u5de5\u827a\u3002\u4e0b\u56fe\u5c55\u793a\u4e86\u6676\u5706\u5c42\u95f4\u5e73\u5766\u5316\u524d\u540e\u7684\u6548\u679c\u3002<\/p><p><img decoding=\"async\" class=\"wp-image-5019 alignnone\" src=\"https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/wafer-planarization-300x166.webp\" alt=\"\" width=\"680\" height=\"376\" srcset=\"https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/wafer-planarization-300x166.webp 300w, https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/wafer-planarization.webp 448w\" sizes=\"(max-width: 680px) 100vw, 680px\" \/><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-8fef38b elementor-widget elementor-widget-text-editor\" data-id=\"8fef38b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>CMP\u7684\u5e94\u7528\u4e3b\u8981\u5728\u96c6\u6210\u7535\u8def\u751f\u4ea7\u7684\u4ee5\u4e0b\u4e09\u4e2a\u65b9\u9762\uff1a1\uff09\u886c\u5e95\u6750\u6599\uff1a\u6240\u6709\u7684\u534a\u5bfc\u4f53\u6750\u886c\u5e95\u7247\u5728\u51fa\u5382\u524d\u5747\u9700\u8981\u5316\u5b66\u673a\u68b0\u629b\u5149\u3002 2\uff09\u82af\u7247\u5236\u9020\u7684\u524d\u9053\u5236\u7a0b\uff1aFEOL\u4e2d\u7684SiO2\uff0cSi3N4\u53ca\u591a\u6676\u7845\u7684\u963b\u6321\u5c42\uff0cSiO2\/BPSG\/PSG\u7b49\u5c42\u95f4\u4ecb\u8d28ILD\uff08Inner-layer dielectric\uff09\u548cAl\/Cu\/W\u7b49\u91d1\u5c5e\u4e92\u8054\uff0c\u903b\u8f91\u5668\u4ef6\u7684\u6676\u4f53\u7ba1\u4e2d\u7684\u9ad8k\u91d1\u5c5e\u6805\u7ed3\u6784\uff08HKMG-high k\/Metal Gate structure\uff09\u7684\u5e73\u5766\u5316\u7b49\uff1b3)\u5148\u8fdb\u5c01\u88c5\uff1a\u96c6\u6210\u7535\u8def\u7684\u5c0f\u578b\u5316\u5f15\u9886\u5c01\u88c5\u5de5\u827a\u7684\u53e0\u5c42\u5316\uff0c\u91d1\u5c5e\u952e\u5408\u9762\u4e5f\u9700\u8981CMP\u5de5\u827a\u786e\u4fdd\u6676\u5706\u7684\u6574\u4f53\u5e73\u5766\u5316\u3002\u4e0d\u540c\u5236\u7a0b\u5bf9\u4e8e\u53bb\u9664\u901f\u7387\u3001\u5747\u5300\u6027\u6709\u4e0d\u540c\u7684\u8981\u6c42\uff0c\u56e0\u6b64\u9700\u8981\u7528\u5230\u4e0d\u540c\u7684\u629b\u5149\u6db2\u3002<\/p><p>\u82f1\u521b\u529b\u79d1\u6280\u4ee3\u7406\u5206\u9500\u7684PS\u7cfb\u5217\u629b\u5149\u6db2\uff0c\u5bf9\u6807\u4e16\u754c\u4e00\u6d41\u629b\u5149\u6db2\u7684\u6027\u80fd\uff0c\u80fd\u6ee1\u8db3\u76ee\u524d8-12\u5bf8\u5927\u7845\u7247\u7684\u751f\u4ea7\u3001\u518d\u751f\u7845\u7247\u5de5\u827a\u7684\u9700\u6c42\uff1b\u540c\u65f6\u63d0\u4f9b\u6ee1\u8db3FAB\u548c\u5c01\u88c5\u5382\u4e0d\u540c\u5236\u7a0b\u8282\u70b9\u6240\u9700\u7684\u6c27\u5316\u7269\u629b\u5149\u6db2\u3001\u94a8\u629b\u5149\u6db2\u3001\u94dc\u629b\u5149\u6db2\u3001\u7845\u901a\u5b54(TSV)\u94dc\u629b\u5149\u6db2\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-104f4aa elementor-widget elementor-widget-heading\" data-id=\"104f4aa\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-medium\">\u4ea7\u54c1\u7cfb\u5217<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6cda1d5 elementor-widget elementor-widget-text-editor\" data-id=\"6cda1d5\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u6211\u4eec\u63d0\u4f9b\u4e86\u57fa\u4e8e\u7845\u5236\u7a0b\u7684\u5168\u5236\u7a0bCMP\u629b\u5149\u6db2\u7684\u89e3\u51b3\u65b9\u6848\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-62d333b elementor-widget elementor-widget-text-editor\" data-id=\"62d333b\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<style type=\"text\/css\">\n.tg  {border-collapse:collapse;border-spacing:0;}\n.tg td{border-color:black;border-style:solid;border-width:1px;font-family:Arial, sans-serif;font-size:14px;\n  overflow:hidden;padding:10px 5px;word-break:normal;}\n.tg th{border-color:black;border-style:solid;border-width:1px;font-family:Arial, sans-serif;font-size:14px;\n  font-weight:normal;overflow:hidden;padding:10px 5px;word-break:normal;}\n.tg .tg-yg0m{background-color:#ffce93;border-color:#333333;font-size:18px;font-weight:bold;text-align:center;vertical-align:top}\n.tg .tg-ted4{border-color:#333333;text-align:center;vertical-align:middle}\n.tg .tg-r54m{background-color:#ffce93;border-color:#333333;font-size:18px;font-weight:bold;text-align:center;vertical-align:middle}\n.tg .tg-bi8n{border-color:#333333;font-weight:bold;text-align:center;vertical-align:middle}\n.tg .tg-de2y{border-color:#333333;text-align:left;vertical-align:top}\n<\/style>\n<table class=\"tg\" style=\"undefined;table-layout: fixed; width: 851px\">\n<colgroup>\n<col style=\"width: 139px\">\n<col style=\"width: 150px\">\n<col style=\"width: 562px\">\n<\/colgroup>\n<thead>\n  <tr>\n    <th class=\"tg-r54m\">\u629b\u5149\u6db2\u7c7b\u578b <\/th>\n    <th class=\"tg-r54m\">\u4ea7\u54c1\u7cfb\u5217 <\/th>\n    <th class=\"tg-yg0m\">\u4ea7\u54c1\u4f18\u70b9 <\/th>\n  <\/tr>\n<\/thead>\n<tbody>\n  <tr>\n    <td class=\"tg-bi8n\" rowspan=\"4\">\u7845\u7c97\u629b\u5149\u6db2 <\/td>\n    <td class=\"tg-ted4\" rowspan=\"4\">PSC01 <\/td>\n    <td class=\"tg-de2y\">\u5e94\u7528\u4e8e8-12\u540b\u5927\u7845\u7247\u53ca\u518d\u751f\u6676\u5706\u7684\u7c97\u629b\u5149 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u9ad8\u53bb\u9664\u901f\u7387\uff08Rate&nbsp;&nbsp;&nbsp;0.8-1.0um\/min\uff09\u3001\u5faa\u73af\u6027\u597d <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6\uff08Ra\uff1c0.7nm\uff0c30um*30um\uff0cAFM\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">1:20-1:40\u7a00\u91ca\u4f7f\u7528 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-bi8n\" rowspan=\"4\">\u7845\u4e2d\u629b\u5149\u6db2 <\/td>\n    <td class=\"tg-ted4\" rowspan=\"4\">PSZ08 <\/td>\n    <td class=\"tg-de2y\">\u5e94\u7528\u4e8e8-12\u540b\u5927\u7845\u7247\u53ca\u518d\u751f\u6676\u5706\u7684\u4e2d\u629b\u5149 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u53bb\u9664\u901f\u7387\u7a33\u5b9a\uff08Rate&nbsp;&nbsp;&nbsp;0.2-0.6um\/min\uff09\u3001\u5faa\u73af\u6027\u597d <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6\uff08Ra\uff1c0.3nm\uff0c30um*30um\uff0cAFM\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">1:20-1:40\u7a00\u91ca\u4f7f\u7528 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-bi8n\" rowspan=\"6\">\u7845\u7cbe\u629b\u5149\u6db2 <\/td>\n    <td class=\"tg-ted4\" rowspan=\"6\">PSF3200 <\/td>\n    <td class=\"tg-de2y\">\u5e94\u7528\u4e8e8-12\u540b\u5927\u7845\u7247\u53ca\u518d\u751f\u6676\u5706\u7684\u7cbe\u629b\u5149 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u4f4e\u9897\u7c92\u6b8b\u7559\uff0812\u2019wafer\uff0c40nmPA\uff1c80ea\uff0cSP5\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6\uff0812\u2019wafer\uff0cRa\uff1c0.10nm\uff0c30um*30um\uff0cAFM\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u4f4eHaze\u503c\uff0812\u2019wafer\uff0cHaze\uff1c0.08\uff0cSP5\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u4f4e\u91d1\u5c5e\u79bb\u5b50\u542b\u91cf\uff08Mn+\u603b\uff1c5ppm\uff0cICP-MS\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">1:19\u7a00\u91ca\u4f7f\u7528 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-bi8n\" rowspan=\"7\">\u6c27\u5316\u7269\u629b\u5149\u6db2 <\/td>\n    <td class=\"tg-ted4\" rowspan=\"7\">PSO4000 <br>PSO4500 <br>     PSO3000\uff08\u9ad8\u7eaf\uff09 <\/td>\n    <td class=\"tg-de2y\">PSO4000\u3001PSO4500\u5e94\u7528\u4e8e28nm\u53ca\u4ee5\u4e0a\u6280\u672f\u8282\u70b9\u96c6\u6210\u7535\u8def\u6805\u6781\u6c27\u5316\u5c42\u3001\u727a\u7272\u5c42\u3001\u7edd\u7f18\u5c42\u548c\u5c42\u95f4\u4ecb\u8d28\u6750\u6599\u7684\u629b\u5149 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u9ad8\u53bb\u9664\u901f\u7387\uff08Rate&nbsp;&nbsp;&nbsp;4000A\/min@3Psi\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6\uff08Ra\uff1c0.25nm\uff0c30um*30um\uff0cAFM\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">PSO3000\uff08\u9ad8\u7eaf\uff09\u4e3a\u9ad8\u7eaf\u6c27\u5316\u7269\u629b\u5149\u6db2\uff0c\u9002\u7528\u4e8e\u66f4\u9ad8\u6280\u672f\u8282\u70b9 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u53bb\u9664\u901f\u7387\u7a33\u5b9a\uff08Rate&nbsp;&nbsp;&nbsp;3000A\/min@3Psi\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u91d1\u5c5e\u79bb\u5b50\u542b\u91cf\u4f4e\uff08M\u603bn+\u22645ppm\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">1:1\u7a00\u91ca\u6216\u8005\u539f\u6db2\u4f7f\u7528 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-bi8n\" rowspan=\"5\">\u94a8\u629b\u5149\u6db2 <\/td>\n    <td class=\"tg-ted4\" rowspan=\"5\">PSW3007 <\/td>\n    <td class=\"tg-de2y\">PSW3007\u5e94\u7528\u4e8e130nm\u53ca\u4ee5\u4e0a\u6280\u672f\u8282\u70b9\u96c6\u6210\u7535\u8def\u91d1\u5c5eW\u7684\u629b\u5149 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u9ad8\u53bb\u9664\u901f\u7387\uff083000~4000A\/min\uff0c\u53ef\u8c03\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6\uff08Ra\uff1c0.3nm\uff0c30um*30um\uff0cAFM\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u9ad8\u9009\u62e9\u6bd4\uff08RateW: RateTEOS=20~100\u53ef\u8c03\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u539f\u6db2\u6216\u80051:1\u7a00\u91ca\u4f7f\u7528 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-bi8n\" rowspan=\"10\">\u94dc\u629b\u5149\u6db2 <\/td>\n    <td class=\"tg-ted4\" rowspan=\"10\">PSCu7800 <br>PSCu5700<br>\uff08\u9ad8\u7eaf\uff09 <\/td>\n    <td class=\"tg-de2y\">PSCu7800\u5e94\u7528\u4e8e28nm\u53ca\u4ee5\u4e0a\u6280\u672f\u8282\u70b9\u96c6\u6210\u7535\u8defCu\u94dc\u5e03\u7ebf\u7684\u629b\u5149 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u9ad8\u53bb\u9664\u901f\u7387\uff0c\u5bf9CMP\u538b\u529b\u654f\u611f\uff088500A\/min@1.95Psi\uff0c5000A\/min@1.25Psi\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u9ad8\u901f\u7387\u9009\u62e9\u6bd4\uff08RateCu: RateTa\uff1aRateTEOS\uff0c700:0.2:1\uff0c\u53ef\u8c03\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6\uff0812\u2019wafer\uff0cRa\uff1c0.40nm\uff0c30um*30um\uff0cAFM\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">1:10\u7a00\u91ca\u4f7f\u7528 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">PSCu5700\uff08\u9ad8\u7eaf\uff09\u91d1\u5c5e\u79bb\u5b50\u542b\u91cf\u4f4e\uff0c\u66f4\u9002\u7528\u4e8e\u5148\u8fdb\u5236\u7a0b <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u53bb\u9664\u901f\u7387\u7a33\u5b9a\uff0c\u5bf9CMP\u538b\u529b\u654f\u611f\uff085700A\/min@1.95Psi\uff0c3800A\/min@1.25Psi\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u9ad8\u901f\u7387\u9009\u62e9\u6bd4\uff08RateCu: RateTa\uff1aRateTEOS\uff0c1800:1:1.5\uff0c\u53ef\u8c03\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6\uff0812\u2019wafer\uff0cRa\uff1c0.40nm\uff0c30um*30um\uff0cAFM\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">1:10\u7a00\u91ca\u4f7f\u7528 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-bi8n\" rowspan=\"6\">TSV Cu \u629b\u5149\u6db2 <\/td>\n    <td class=\"tg-ted4\" rowspan=\"6\">PST13000 <br> PST22000 <\/td>\n    <td class=\"tg-de2y\">PST13000\u5e94\u7528\u4e8e\u96c6\u6210\u7535\u8defTSV&nbsp;&nbsp;&nbsp;Cu\u7684\u629b\u5149\uff0c\u9ad8\u53bb\u9664\u901f\u7387\uff0c\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6\uff0c\u5bf9Dishing\u63a7\u5236\u80fd\u529b\u5f3a <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u9ad8\u53bb\u9664\u901f\u7387\uff0c\u5bf9CMP\u538b\u529b\u654f\u611f\uff0813000A\/min@2.2Psi\uff0c6000A\/min@1.1Psi\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u4f4e\u7c97\u7cd9\u5ea6\uff0812\u2019wafer\uff0cRa\uff1c2.0nm\uff0c30um*30um\uff0cAFM\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">PST22000\u5e94\u7528\u4e8e\u96c6\u6210\u7535\u8defTSV&nbsp;&nbsp;&nbsp;Cu\u7684\u629b\u5149\uff0c\u9ad8\u53bb\u9664\u901f\u7387\uff0c\u4f4e\u8868\u9762\u7c97\u7cd9\u5ea6 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u9ad8\u53bb\u9664\u901f\u7387\uff0c\u5bf9CMP\u538b\u529b\u654f\u611f\uff0822000A\/min@2.2Psi\uff0c12000A\/min@1.1Psi\uff09 <\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-de2y\">\u4f4e\u7c97\u7cd9\u5ea6\uff0812\u2019wafer\uff0cRa\uff1c2.5nm\uff0c30um*30um\uff0cAFM\uff09 <\/td>\n  <\/tr>\n<\/tbody>\n<\/table>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-35d87e9 elementor-widget elementor-widget-heading\" data-id=\"35d87e9\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-medium\">\u4ea7\u54c1\u4f18\u52bf<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2b851e9 elementor-widget elementor-widget-text-editor\" data-id=\"2b851e9\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u82f1\u521b\u529b\u79d1\u6280\u63d0\u4f9b\u7684\u629b\u5149\u6db2\u5177\u6709\u56fd\u5185\u81ea\u4e3b\u77e5\u8bc6\u4ea7\u6743\uff0c\u53ef\u5ab2\u7f8e\u56fd\u9645\u4e3b\u6d41\u5382\u5546\u7684\u6027\u80fd\u3002\u5176\u9ad8\u7a00\u91ca\u6bd4\u3001\u7a33\u5b9a\u7684\u629b\u5149\u6027\u80fd\u4f7f\u5f97\u5177\u6709\u8f83\u9ad8\u7684\u6027\u4ef7\u6bd4\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<section class=\"elementor-section elementor-inner-section elementor-element elementor-element-74de1e5 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"74de1e5\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-9c9ca63\" data-id=\"9c9ca63\" data-element_type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-6690e11 elementor-widget elementor-widget-text-editor\" data-id=\"6690e11\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"padding-left: 60px;\">&gt;&gt; \u9ad8\u53bb\u9664\u901f\u7387<\/p><p style=\"padding-left: 60px;\">&gt;&gt; \u9ad8\u7a00\u91ca\u6bd4<\/p><p style=\"padding-left: 60px;\">&gt;&gt; \u9ad8\u9009\u62e9\u6bd4<\/p><p style=\"padding-left: 60px;\">&gt;&gt; \u9ad8\u7a33\u5b9a\u6027<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-inner-column elementor-element elementor-element-d5887a5\" data-id=\"d5887a5\" data-element_type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-92f91e4 elementor-widget elementor-widget-text-editor\" data-id=\"92f91e4\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"padding-left: 60px;\">&gt;&gt; \u4f4e\u96fe\u503c(haze)<\/p><p style=\"padding-left: 60px;\">&gt;&gt;\u00a0 \u4f4e\u7f3a\u9677<\/p><p style=\"padding-left: 60px;\">&gt;&gt; \u66f4\u4f4e\u6210\u672c<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<div class=\"elementor-element elementor-element-71ea0d0 elementor-widget elementor-widget-heading\" data-id=\"71ea0d0\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h3 class=\"elementor-heading-title elementor-size-medium\">\u5e94\u7528\u9886\u57df<\/h3>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-0e09722 elementor-widget elementor-widget-text-editor\" data-id=\"0e09722\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>PS\u7cfb\u5217\u7684\u629b\u5149\u6db2\u4ea7\u54c1\u63d0\u4f9b\u4f9b\u7845\u6750\u6599\u7684\u7c97\u629b\u3001\u4e2d\u629b\u3001\u7cbe\u629b\u5230\u6c27\u5316\u7269\u629b\u5149\u6db2\uff0c\u53ca\u94dc\u3001\u94a8\u629b\u5149\u6db2\uff0c\u8986\u76d6\u4e86\u4ece\u534a\u5bfc\u4f53\u6750\u6599\u5230FEoL\u5230BEoL\u5168\u65b9\u4f4d\u7684\u89e3\u51b3\u65b9\u6848\u3002<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-6d72b16 elementor-widget elementor-widget-image\" data-id=\"6d72b16\" data-element_type=\"widget\" data-widget_type=\"image.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<img loading=\"lazy\" decoding=\"async\" width=\"800\" height=\"360\" src=\"https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/schematic-show-planarized-multi-level-metal-structure.jpg\" class=\"attachment-full size-full wp-image-5021\" alt=\"\" srcset=\"https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/schematic-show-planarized-multi-level-metal-structure.jpg 800w, https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/schematic-show-planarized-multi-level-metal-structure-300x135.jpg 300w, https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/schematic-show-planarized-multi-level-metal-structure-768x346.jpg 768w, https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2022\/06\/schematic-show-planarized-multi-level-metal-structure-600x270.jpg 600w\" sizes=\"(max-width: 800px) 100vw, 800px\" \/>\t\t\t\t\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-f6a895f elementor-widget elementor-widget-text-editor\" data-id=\"f6a895f\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<style type=\"text\/css\">\n.tg  {border-collapse:collapse;border-spacing:0;}\n.tg td{border-color:black;border-style:solid;border-width:1px;font-family:Arial, sans-serif;font-size:14px;\n  overflow:hidden;padding:15px 4px;word-break:normal;}\n.tg th{border-color:black;border-style:solid;border-width:1px;font-family:Arial, sans-serif;font-size:14px;\n  font-weight:normal;overflow:hidden;padding:15px 4px;word-break:normal;}\n.tg .tg-i32f{background-color:#ffce93;border-color:#333333;font-size:15px;font-weight:bold;text-align:center;vertical-align:middle}\n.tg .tg-ted4{border-color:#333333;text-align:center;vertical-align:middle}\n.tg .tg-bi8n{border-color:#333333;font-weight:bold;text-align:center;vertical-align:middle}\n.tg .tg-3pgx{background-color:#ffccc9;border-color:#333333;text-align:center;vertical-align:middle}\n<\/style>\n<table class=\"tg\" style=\"undefined;table-layout: fixed; width: 854px\">\n<colgroup>\n<col style=\"width: 109px\">\n<col style=\"width: 123px\">\n<col style=\"width: 90px\">\n<col style=\"width: 88px\">\n<col style=\"width: 88px\">\n<col style=\"width: 89px\">\n<col style=\"width: 87px\">\n<col style=\"width: 84px\">\n<col style=\"width: 96px\">\n<\/colgroup>\n<thead>\n  <tr>\n    <th class=\"tg-i32f\">\u629b\u5149\u6db2\u7c7b\u578b <\/th>\n    <th class=\"tg-i32f\">\u4ea7\u54c1\u7cfb\u5217 <\/th>\n    <th class=\"tg-i32f\">\u7845\u7247\u751f\u4ea7<\/th>\n    <th class=\"tg-i32f\">\u7845\u7247\u518d\u751f<\/th>\n    <th class=\"tg-i32f\">FEOL<br>\u5c42\u95f4\u4ecb\u8d28<\/th>\n    <th class=\"tg-i32f\">FEOL<br>\u94a8\u901a\u5b54<\/th>\n    <th class=\"tg-i32f\">FEOL<br>\u94dc\u5236\u7a0b<\/th>\n    <th class=\"tg-i32f\">TSV<\/th>\n    <th class=\"tg-i32f\">\u5c01\u88c5CMP<\/th>\n  <\/tr>\n<\/thead>\n<tbody>\n  <tr>\n    <td class=\"tg-bi8n\">\u7845\u7c97\u629b\u5149\u6db2 <\/td>\n    <td class=\"tg-ted4\">PSC01 <\/td>\n    <td class=\"tg-3pgx\">\u25cf<\/td>\n    <td class=\"tg-3pgx\">\u25cf<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-bi8n\">\u7845\u4e2d\u629b\u5149\u6db2 <\/td>\n    <td class=\"tg-ted4\">PSZ08 <\/td>\n    <td class=\"tg-3pgx\">\u25cf<\/td>\n    <td class=\"tg-3pgx\">\u25cf<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-bi8n\">\u7845\u7cbe\u629b\u5149\u6db2 <\/td>\n    <td class=\"tg-ted4\">PSF3200 <\/td>\n    <td class=\"tg-3pgx\">\u25cf<\/td>\n    <td class=\"tg-3pgx\">\u25cf<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-3pgx\">\u25cf<\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-bi8n\">\u6c27\u5316\u7269\u629b\u5149\u6db2 <\/td>\n    <td class=\"tg-ted4\">PSO4000<br>PSO4500<br>PSO3000<br>\uff08\u9ad8\u7eaf\uff09 <\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-3pgx\">\u25cf<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-bi8n\">\u94a8\u629b\u5149\u6db2 <\/td>\n    <td class=\"tg-ted4\">PSW3007 <\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-3pgx\">\u25cf<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-bi8n\">\u94dc\u629b\u5149\u6db2 <\/td>\n    <td class=\"tg-ted4\">PSCu7800<br>PSCu5700<br>\uff08\u9ad8\u7eaf\uff09 <\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-3pgx\">\u25cf<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-3pgx\">\u25cf<\/td>\n  <\/tr>\n  <tr>\n    <td class=\"tg-bi8n\">TSV Cu\u629b\u5149\u6db2 <\/td>\n    <td class=\"tg-ted4\">PST13000<br>PST22000 <\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n    <td class=\"tg-3pgx\">\u25cf<\/td>\n    <td class=\"tg-ted4\">\u3000<\/td>\n  <\/tr>\n<\/tbody>\n<\/table>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-68e55dc\" data-id=\"68e55dc\" data-element_type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-ad114bd elementor-widget elementor-widget-heading\" data-id=\"ad114bd\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-medium\">\u94fe\u63a5<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-e6624a4 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"e6624a4\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fb38c96 elementor-widget elementor-widget-text-editor\" data-id=\"fb38c96\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<blockquote><p>\u4e0b\u8f7d\u8be2\u4ef7\u8868<\/p><\/blockquote><p>\u00a0<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2d7dea6 elementor-widget elementor-widget-heading\" data-id=\"2d7dea6\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-medium\">\u4ea7\u54c1\u805a\u7126<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1580b58 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"1580b58\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-1377685 elementor-widget elementor-widget-text-editor\" data-id=\"1377685\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><img loading=\"lazy\" decoding=\"async\" class=\"alignleft wp-image-2263\" src=\"https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2018\/12\/industry_icon-150x150.png\" alt=\"\" width=\"80\" height=\"80\" srcset=\"https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2018\/12\/industry_icon-150x150.png 150w, https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2018\/12\/industry_icon-100x100.png 100w, https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2018\/12\/elementor\/thumbs\/industry_icon-nzx2apjow9ev9scu1o657odwi3wwrsxmreciivotze.png 65w, https:\/\/www.innotronix.com.cn\/wp-content\/uploads\/2018\/12\/industry_icon.png 277w\" sizes=\"(max-width: 80px) 100vw, 80px\" \/><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-13288e2 elementor-widget elementor-widget-text-editor\" data-id=\"13288e2\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u4ea7\u81ea\u6b27\u7f8e\uff0c\u54c1\u8d28\u53ef\u9760\uff01<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9cd3993 elementor-widget elementor-widget-heading\" data-id=\"9cd3993\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-medium\">\u76f8\u5173\u4ea7\u54c1<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-8a607e0 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"8a607e0\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-2c70207 elementor-widget elementor-widget-text-editor\" data-id=\"2c70207\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"padding-left: 30px;\">&gt;&gt; \u7845\u7247<\/p><p style=\"padding-left: 30px;\">&gt;&gt; \u534a\u5bfc\u4f53\u8bbe\u5907<\/p><p style=\"padding-left: 30px;\">&gt;&gt; \u6676\u5706\u5305\u88c5\u76d2<\/p><p style=\"padding-left: 30px;\">&gt;&gt; SiN SOI\u7845\u7247<\/p><p style=\"padding-left: 30px;\">&gt;&gt; 3C-SiC on SOI\u7845\u7247<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d51674e elementor-widget elementor-widget-heading\" data-id=\"d51674e\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-medium\">\u8d44\u6599\u624b\u518c<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-d504565 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"d504565\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-9c85cf3 elementor-widget elementor-widget-text-editor\" data-id=\"9c85cf3\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p>\u00a0 \u00a0 &gt;&gt; \u4ea7\u54c1\u624b\u518c<\/p><p>\u00a0 \u00a0 &gt;&gt; \u7528\u6237\u624b\u518c<\/p><p>\u00a0 \u00a0 &gt;&gt; \u6570\u636e\u8868<\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-40df361 elementor-widget elementor-widget-heading\" data-id=\"40df361\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h2 class=\"elementor-heading-title elementor-size-medium\">\u6211\u8981\u54a8\u8be2<\/h2>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-fc58524 elementor-widget-divider--view-line elementor-widget elementor-widget-divider\" data-id=\"fc58524\" data-element_type=\"widget\" data-widget_type=\"divider.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<div class=\"elementor-divider\">\n\t\t\t<span class=\"elementor-divider-separator\">\n\t\t\t\t\t\t<\/span>\n\t\t<\/div>\n\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-28cc352 elementor-widget elementor-widget-text-editor\" data-id=\"28cc352\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p><span style=\"color: #333300;\">Tel: 18600564919<\/span><br \/><span style=\"color: #333300;\">Email:sales##innotronix.com.cn<\/span><br \/><span style=\"color: #333300;\">(\u4ee5@\u66ff\u6362##)<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-07f71e7 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"07f71e7\" data-element_type=\"section\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-50 elementor-top-column elementor-element elementor-element-6091989\" data-id=\"6091989\" data-element_type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-fd68a73 elementor-widget elementor-widget-heading\" data-id=\"fd68a73\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">\u5728\u7ebf\u8be2\u4ef7<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-5442239 elementor-button-align-center elementor-widget elementor-widget-form\" data-id=\"5442239\" data-element_type=\"widget\" data-settings=\"{&quot;step_next_label&quot;:&quot;Next&quot;,&quot;step_previous_label&quot;:&quot;Previous&quot;,&quot;button_width&quot;:&quot;100&quot;,&quot;step_type&quot;:&quot;number_text&quot;,&quot;step_icon_shape&quot;:&quot;circle&quot;}\" data-widget_type=\"form.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t<form class=\"elementor-form\" method=\"post\" name=\"general inquiry\">\n\t\t\t<input type=\"hidden\" name=\"post_id\" value=\"4951\"\/>\n\t\t\t<input type=\"hidden\" name=\"form_id\" value=\"5442239\"\/>\n\t\t\t<input type=\"hidden\" name=\"referer_title\" value=\"\" \/>\n\n\t\t\t\n\t\t\t<div class=\"elementor-form-fields-wrapper elementor-labels-\">\n\t\t\t\t\t\t\t\t<div class=\"elementor-field-type-text elementor-field-group elementor-column elementor-field-group-name elementor-col-100 elementor-field-required\">\n\t\t\t\t\t\t\t\t\t\t\t\t<label for=\"form-field-name\" class=\"elementor-field-label elementor-screen-only\">\n\t\t\t\t\t\t\t\t\u59d3\u540d\t\t\t\t\t\t\t<\/label>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<input size=\"1\" type=\"text\" name=\"form_fields[name]\" id=\"form-field-name\" class=\"elementor-field elementor-size-sm  elementor-field-textual\" placeholder=\"\u8bf7\u8f93\u5165\u59d3\u540d(\u5fc5\u9700)\" required=\"required\" aria-required=\"true\">\n\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<div class=\"elementor-field-type-tel elementor-field-group elementor-column elementor-field-group-8081e2a elementor-col-100 elementor-field-required\">\n\t\t\t\t\t\t\t\t\t\t\t\t<label for=\"form-field-8081e2a\" class=\"elementor-field-label elementor-screen-only\">\n\t\t\t\t\t\t\t\t\u624b\u673a\u53f7\u7801\t\t\t\t\t\t\t<\/label>\n\t\t\t\t\t\t\t\t<input size=\"1\" type=\"tel\" name=\"form_fields[8081e2a]\" id=\"form-field-8081e2a\" class=\"elementor-field elementor-size-sm  elementor-field-textual\" placeholder=\"\u8bf7\u8f93\u5165\u624b\u673a\u53f7\u7801(\u5fc5\u9700)\" required=\"required\" aria-required=\"true\" pattern=\"[0-9()#&amp;+*-=.]+\" title=\"Only numbers and phone characters (#, -, *, etc) are accepted.\">\n\n\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<div class=\"elementor-field-type-email elementor-field-group elementor-column elementor-field-group-email elementor-col-100 elementor-field-required\">\n\t\t\t\t\t\t\t\t\t\t\t\t<label for=\"form-field-email\" class=\"elementor-field-label elementor-screen-only\">\n\t\t\t\t\t\t\t\t\u7535\u5b50\u90ae\u4ef6\t\t\t\t\t\t\t<\/label>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<input size=\"1\" type=\"email\" name=\"form_fields[email]\" id=\"form-field-email\" class=\"elementor-field elementor-size-sm  elementor-field-textual\" placeholder=\"\u8bf7\u8f93\u5165\u7535\u5b50\u90ae\u4ef6\u5730\u5740(\u5fc5\u9700)\" required=\"required\" aria-required=\"true\">\n\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<div class=\"elementor-field-type-text elementor-field-group elementor-column elementor-field-group-f520be5 elementor-col-100\">\n\t\t\t\t\t\t\t\t\t\t\t\t<label for=\"form-field-f520be5\" class=\"elementor-field-label elementor-screen-only\">\n\t\t\t\t\t\t\t\t\u516c\u53f8\u540d\u79f0\t\t\t\t\t\t\t<\/label>\n\t\t\t\t\t\t\t\t\t\t\t\t\t\t<input size=\"1\" type=\"text\" name=\"form_fields[f520be5]\" id=\"form-field-f520be5\" class=\"elementor-field elementor-size-sm  elementor-field-textual\" placeholder=\"\u8bf7\u8f93\u5165\u516c\u53f8\u540d\u79f0\u53ca\u90e8\u95e8(\u5fc5\u9700)\">\n\t\t\t\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t\t\t\t\t<div class=\"elementor-field-type-textarea elementor-field-group elementor-column elementor-field-group-message elementor-col-100\">\n\t\t\t\t\t\t\t\t\t\t\t\t<label for=\"form-field-message\" class=\"elementor-field-label elementor-screen-only\">\n\t\t\t\t\t\t\t\t\u54a8\u8be2\u5185\u5bb9\t\t\t\t\t\t\t<\/label>\n\t\t\t\t\t\t<textarea class=\"elementor-field-textual elementor-field  elementor-size-sm\" name=\"form_fields[message]\" id=\"form-field-message\" rows=\"4\" 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elementor-element elementor-element-21b25d1\" data-id=\"21b25d1\" data-element_type=\"column\" data-settings=\"{&quot;background_background&quot;:&quot;classic&quot;}\">\n\t\t\t<div class=\"elementor-widget-wrap elementor-element-populated\">\n\t\t\t\t\t\t<div class=\"elementor-element elementor-element-3b2f8c9 elementor-widget elementor-widget-heading\" data-id=\"3b2f8c9\" data-element_type=\"widget\" data-widget_type=\"heading.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t<h4 class=\"elementor-heading-title elementor-size-default\">\u7535\u8bdd&amp;\u90ae\u4ef6\u8be2\u4ef7<\/h4>\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-ccb89ba elementor-widget elementor-widget-text-editor\" data-id=\"ccb89ba\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"text-align: center;\"><span style=\"color: #000000;\">\u8054\u7cfb\u7535\u8bdd\uff1a18600564919<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t<div class=\"elementor-element elementor-element-c3e5426 elementor-widget elementor-widget-text-editor\" data-id=\"c3e5426\" data-element_type=\"widget\" data-widget_type=\"text-editor.default\">\n\t\t\t\t<div class=\"elementor-widget-container\">\n\t\t\t\t\t\t\t\t\t<p style=\"text-align: center;\"><span style=\"color: #000000;\">\u90ae\u4ef6\uff1asales##innotronix.com.cn (\u7528@\u66ff\u4ee3##\u5373\u53ef)<\/span><\/p>\t\t\t\t\t\t\t\t<\/div>\n\t\t\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<section class=\"elementor-section elementor-top-section elementor-element elementor-element-c343780 elementor-section-boxed elementor-section-height-default elementor-section-height-default\" data-id=\"c343780\" data-element_type=\"section\">\n\t\t\t\t\t\t<div class=\"elementor-container elementor-column-gap-default\">\n\t\t\t\t\t<div class=\"elementor-column elementor-col-100 elementor-top-column elementor-element elementor-element-9b92eff\" data-id=\"9b92eff\" data-element_type=\"column\">\n\t\t\t<div class=\"elementor-widget-wrap\">\n\t\t\t\t\t\t\t<\/div>\n\t\t<\/div>\n\t\t\t\t\t<\/div>\n\t\t<\/section>\n\t\t\t\t<\/div>\n\t\t","protected":false},"excerpt":{"rendered":"<p>\u5316\u5b66\u673a\u68b0\u629b\u5149\u6db2|CMP Slurry \u66f4\u9ad8\u54c1\u8d28\u3001\u66f4\u9ad8\u6027\u4ef7\u6bd4\uff01 \u4ea7\u54c1\u63cf\u8ff0 \u5316\u5b66\u673a\u68b0\u629b\u5149CMP(Chemical  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